Shallow trench isolation - Wikipedia
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Novel gap filling technique of shallow trench isolation structure in 16/14 nm FinFET using sub-atmospheric chemical vapor deposition
1.2 Isolation Techniques
Can you explain Shallow Trench Isolation (STI) process in semiconductor fabrication? - Quora
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File:Shallow trench isolation process.svg - Wikipedia
IC Technology: Shallow Trench Isolation technique
Cross section of a) a LOCOS isolated and b) shallow-trench isolated
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Device Isolation Technique, LOCOS and STI
Latch-Up
Can you explain Shallow Trench Isolation (STI) process in semiconductor fabrication? - Quora
Shallow Trench Isolation - an overview
